| SEM Beam Blanker |
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| Model 890 beam Blanker for e-beam lithography. |
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| Specifications: |
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| Input Voltage: single phase |
| 100-230 VAC 50/60 HZ |
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| Input: TTL or 50 ohm termination selectable. |
Output: 5 VDC
to 140 VDC continuously variable. |
| Rep rate: DC to 3 MHZ |
| Rise/fall time: <50 ns into open load |